| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to replace a target without releasing a vacuum in an apparatus on the downstream side.SOLUTION: According to an embodiment, an ion source connected to an evacuated apparatus on the downstream side comprises: an evacuated first vacuum container; a first target which is arranged in the first vacuum container and generates an ion by being irradiated with laser light; a second vacuum container which is attached to the first vacuum container and is capable of being evacuated independently of the first vacuum container; a second target which is stored in the second vacuum container and differs from the first target; and a first valve for opening/closing a flow channel between the first and second vacuum containers. The first target is replaced with the second target stored in the second vacuum container in a state where a second valve is opened, after the second vacuum container is evacuated in a state where the first valve is closed.</p> |
