发明名称 |
SILICON SINGLE CRYSTAL PRODUCTION APPARATUS, AND SILICON SINGLE CRYSTAL PRODUCTION METHOD |
摘要 |
<p>Provided is a silicon single crystal production apparatus, whereby it becomes possible to produce a silicon single crystal having high quality and a large size readily employing a casting method. The apparatus is equipped with: a crucible (3, 4) in which a seed crystal of a silicon single crystal is held on a part of the bottom surface thereof and in which solid and/or liquid silicon is also held; a heat-absorbing section in which heat generated on a region on which the seed crystal of the silicon single crystal is placed in the crucible (3, 4) can be absorbed through the bottom surface of the crucible (3, 4); and a heating section in which a region surrounding the region to be cooled by the heat-absorbing section can be heated with a heat source arranged below the bottom surface of the crucible (3, 4). In the apparatus, the vector (A) of a heat flux generated by the heat-absorbing section and the vector (B) of a heat flux generated by the heating section are controlled while keeping the relationship represented by the formula: A×B < 0.</p> |
申请公布号 |
WO2014156986(A1) |
申请公布日期 |
2014.10.02 |
申请号 |
WO2014JP57833 |
申请日期 |
2014.03.20 |
申请人 |
KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION;NATIONAL INSTITUTE FOR MATERIALS SCIENCE |
发明人 |
KAKIMOTO KOICHI;HARADA HIROFUMI;GAO BING |
分类号 |
C30B29/06;B22D27/04;C01B33/02;C30B11/00;H01L31/18 |
主分类号 |
C30B29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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