| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an inspection device having a function of discriminating the irregularity shape of a fine defect of about 5μm and learning a defect type.SOLUTION: The defect inspection device inspects a defect existing in a planar inspection object. The defect inspection device includes: a one-dimensional or two-dimensional imaging device including an optical system having a resolution of the range of 0.05μm to 2μm; lighting means including a coaxial epi-illumination mechanism; and means for detecting a defect and discriminating the irregularity shape of the defect.</p> |
