| 摘要 |
PROBLEM TO BE SOLVED: To provide a nano particle discriminating apparatus which can discriminate and collect a nano particle which has a different diameter and is obtained from one material.SOLUTION: A nano particle discriminating apparatus 1 includes: multiple rooms 9 arranged in series and separated each other by a partition wall 5; a generation room 2 in which material 4 to be evaporated is disposed; multiple deposition rooms 3a-3c in which a substrate 7 is disposed, to which nao particles 8a-8c generated from the material 4 are deposited; multiple communication pipes 6 disposed by penetrating through each of the partition wall 5 to communicate with adjacent multiple rooms 9 each other; a gas introduction pipe 10 which communicates with the generation room 2 to introduce cooling gas; and a vacuum piping 14 which communicates with a high vacuum room 13 which is the room 9 disposed at the farthest position from the generation room 2 among the multiple rooms 9, and is the deposition room 3c for vacuum drawing. |
