SUBSTRATE AGENT AND PATTERN FORMATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate agent and a method of forming a pattern of a layer containing a block copolymer by using the substrate agent.SOLUTION: A substrate agent for phase separation of a layer containing a block copolymer 3 consisting of a plurality of kinds of blocks formed on a substrate 1 and bonded together contains a resin ingredient, and the resin ingredient comprises structural units having an aromatic group, structural units having a hydroxyalkyl group and structural units having no aromatic groups or hydroxyalkyl groups.