Removable compartments for workpiece stocker

摘要

The present invention discloses apparatuses and method for configuring a compartmentable equipment to accommodate emergency responses. An exemplary equipment comprises a plurality of removable compartments for storing workpieces so that in emergency events, such as power failure or equipment failure, the workpieces can be removed from the equipment for continuing processing without disrupting the flow of the fabrication facility. The compartmentable equipment can comprise emergency access ports, including mating interface to a portable workpiece removal equipment to allow accessing the individual compartments without compromising the quality, defects and yield of the workpieces stored in the stocker.

主权项

1. A workpiece stocker comprising:
a chamber for storing a plurality of workpieces; a robotic mechanism for transferring the workpieces from the chamber to an IO station; an emergency access port for accessing the workpiece in the event of a failure of the stocker, wherein the emergency access port comprises mating interface, wherein the mating interface is configured to be mated to an enclosure, wherein the enclosure is configured to link to the workpiece stocker to accept workpieces removed from the workpiece stocker without exposing other workpieces in the workpiece stocker to outside ambient.