发明名称 SOLUTION COMPOSITION FOR FORMING OXIDE SEMICONDUCTOR, AND OXIDE SEMICONDUCTOR AND ELECTRONIC DEVICE INCLUDING THE SAME
摘要 A solution composition for forming an oxide semiconductor includes a metal oxide precursor, and one of a metal thioacetate and a derivative thereof.
申请公布号 US2014291664(A1) 申请公布日期 2014.10.02
申请号 US201314043324 申请日期 2013.10.01
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 SEON Jong-baek;RYU Myung-kwan;LEE Sang-yoon
分类号 H01L29/12 主分类号 H01L29/12
代理机构 代理人
主权项 1. A solution composition for forming an oxide semiconductor, comprising: a metal oxide precursor; and one of a metal thioacetate and a derivative thereof.
地址 Suwon-Si KR