发明名称 |
PROCESS FOR MANUFACTURING A COMPOSITE STRUCTURE |
摘要 |
The invention relates to a process for manufacturing a composite structure, said process comprising the following steps: a) providing a donor substrate (50) and a carrier substrate (10); b) forming a dielectric layer (30); c) forming a covering layer (20); d) forming a weakened zone (60) in the donor substrate (50); e) joining the carrier substrate (10) and the donor substrate (50) via a contact surface (70) having an outline (Cs); f) fracturing the donor substrate (50) via the weakened zone (60), steps b) and e) being executed so that the outline (Cz) is inscribed in the outline (Cs), and step c) being executed so that the covering layer (20) covers the peripheral surface of the dielectric layer (30). |
申请公布号 |
WO2014154978(A1) |
申请公布日期 |
2014.10.02 |
申请号 |
WO2014FR50666 |
申请日期 |
2014.03.21 |
申请人 |
SOITEC |
发明人 |
KERDILES, SÉBASTIEN;CHABANNE, GUILLAUME;BOEDT, FRANÇOIS |
分类号 |
H01L21/62 |
主分类号 |
H01L21/62 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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