发明名称 PROCESS FOR MANUFACTURING A COMPOSITE STRUCTURE
摘要 The invention relates to a process for manufacturing a composite structure, said process comprising the following steps: a) providing a donor substrate (50) and a carrier substrate (10); b) forming a dielectric layer (30); c) forming a covering layer (20); d) forming a weakened zone (60) in the donor substrate (50); e) joining the carrier substrate (10) and the donor substrate (50) via a contact surface (70) having an outline (Cs); f) fracturing the donor substrate (50) via the weakened zone (60), steps b) and e) being executed so that the outline (Cz) is inscribed in the outline (Cs), and step c) being executed so that the covering layer (20) covers the peripheral surface of the dielectric layer (30).
申请公布号 WO2014154978(A1) 申请公布日期 2014.10.02
申请号 WO2014FR50666 申请日期 2014.03.21
申请人 SOITEC 发明人 KERDILES, SÉBASTIEN;CHABANNE, GUILLAUME;BOEDT, FRANÇOIS
分类号 H01L21/62 主分类号 H01L21/62
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