| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic member which contains magnesium oxide and includes an electrode having more improved properties, and to provide a member for a semiconductor manufacturing apparatus.SOLUTION: A member 20 for a semiconductor manufacturing apparatus includes a substrate part 22 and a ceramic member 30 formed on the substrate part 22. The ceramic member 30 includes a ceramic base 32 containing at least one of magnesium oxide, a magnesium oxide solid solution in which a prescribed component is dissolved in magnesium oxide, and zirconium oxide, and an electrode 34 disposed in a part of the ceramic base 32 and containing a ruthenium-aluminum alloy as an electrode component. The ceramic member 30 is a plate-like member, and has a structure in which the electrode 34 is embedded. A power supply member 26 inserted from the bottom of the ceramic member 30 is connected to the electrode 34, and electric power is supplied from the power supply member 26. |
