METHOD FOR PRODUCING PERIODIC TABLE GROUP 13 METAL NITRIDE SEMICONDUCTOR CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a method for resolving problems associated with charging of a solvent containing nitrogen atoms in a reaction vessel in ammonothermal process to grow a crystal smoothly and stably.SOLUTION: The aforementioned problems may be solved and a periodic table group 13 metal nitride semiconductor crystal may be grown smoothly and stably by charging a solvent with a region of 40% or more inside a reaction vessel set to -100°C or more and -30°C or less.