| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve durability of a probe pad.SOLUTION: A probe card substrate 4 comprises an insulated base 1, a wiring conductor 2 provided in the insulated base 1, and a probe pad 3 provided on the main surface of the insulated base 1. The probe pad 3 is electrically connected to the wiring conductor 2 and is brought into contact with a probe pin 6. The probe pad 3 has a peripheral region including a concave portion 3a and a central region including a first convex portion 3b.</p> |
