WAFER LEVEL CENTRIFUGE FOR MEMS STICTION DETECTION AND SCREENING SYSTEM AND METHOD

摘要

A wafer level centrifuge (WLC) system and method of testing MEMS devices using the system. The wafer level centrifuge (WLC) system can include a base centrifuge system and a cassette mounting hub coupled to the base centrifuge system. The method can include applying a smooth and continuous acceleration profile to two or more MEMS wafers via the base centrifuge system. Each of the two or more MEMS wafers can have one or more MEMS devices formed thereon. The two or more MEMS wafers can be provided in two or more wafer holding cassettes configured on the cassette mounting hub. The method can also include identifying one or more target MEMS wafers, which can include identifying stiction in one or more MEMS devices on the one or more MEMS wafers.

主权项

1. A wafer level centrifuge (WLC) system, the system comprising:
a base centrifuge system comprising a variable speed controller, a drive hub, and a protective enclosure; a cassette mounting hub coupled to the base centrifuge system; and two or more wafer holding cassettes configured on the dove tail cassette mounting hub.