发明名称 |
METHOD FOR MANUFACTURING AIR-SUSPENDED SINGLE CARBON NANOWIRE AND OVERLAPPING NANOELECTRODE PAIR |
摘要 |
<p>The present invention provides a method for manufacturing an air-suspended single carbon nanowire and an overlapping nanoelectrode pair, and an air-suspended single carbon nanowire and an overlapping nanoelectrode pair manufactured using said method. An air-suspended single carbon nanowire, which is manufactured at a high yield ratio by the method for manufacturing an air-suspended single carbon nanowire according to the present invention, has a minimized size, and an air-suspended carbon nanomesh, which is manufactured at a high yield ratio by the method for manufacturing an overlapping nanoelectrode pair according to the present invention, is thin and dense. The present invention also provides a gas sensor or an electrochemical sensor, to which an air-suspended single carbon nanowire and an overlapping nanoelectrode pair manufactured by the method according to the present invention are applied.</p> |
申请公布号 |
WO2014157991(A1) |
申请公布日期 |
2014.10.02 |
申请号 |
WO2014KR02670 |
申请日期 |
2014.03.28 |
申请人 |
SK INNOVATION CO., LTD.;UNIST ACADEMY-INDUSTRY RESEARCH CORPORATION |
发明人 |
SHIN, HEUNG-JOO;HEO, JEONG-IL;LIM, YEONG-JIN |
分类号 |
G01N27/407;B82B3/00;G01N27/30;H01L21/28 |
主分类号 |
G01N27/407 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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