发明名称 METHOD FOR MANUFACTURING AIR-SUSPENDED SINGLE CARBON NANOWIRE AND OVERLAPPING NANOELECTRODE PAIR
摘要 <p>The present invention provides a method for manufacturing an air-suspended single carbon nanowire and an overlapping nanoelectrode pair, and an air-suspended single carbon nanowire and an overlapping nanoelectrode pair manufactured using said method. An air-suspended single carbon nanowire, which is manufactured at a high yield ratio by the method for manufacturing an air-suspended single carbon nanowire according to the present invention, has a minimized size, and an air-suspended carbon nanomesh, which is manufactured at a high yield ratio by the method for manufacturing an overlapping nanoelectrode pair according to the present invention, is thin and dense. The present invention also provides a gas sensor or an electrochemical sensor, to which an air-suspended single carbon nanowire and an overlapping nanoelectrode pair manufactured by the method according to the present invention are applied.</p>
申请公布号 WO2014157991(A1) 申请公布日期 2014.10.02
申请号 WO2014KR02670 申请日期 2014.03.28
申请人 SK INNOVATION CO., LTD.;UNIST ACADEMY-INDUSTRY RESEARCH CORPORATION 发明人 SHIN, HEUNG-JOO;HEO, JEONG-IL;LIM, YEONG-JIN
分类号 G01N27/407;B82B3/00;G01N27/30;H01L21/28 主分类号 G01N27/407
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