发明名称 CALIBRATABLE BEAM SHAPING SYSTEM AND METHOD
摘要 PROBLEM TO BE SOLVED: To provide a new beam shaping technique that can shape an intensity distribution and a wave-front of a coherent light beam with high precision and a minimum loss.SOLUTION: A beam shaping system includes first and second optical modules that are housed in a spaced-apart relationship in an optical path of passing light, and that sequentially apply a beam shaping to light incident thereon. The beam shaping system includes first and second alignment modules that carry the first and second optical modules, respectively, and are operable for laterally positioning the optical module with respect to the optical path. A calibration module of the beam shaping system is connectable to the first and second alignment modules, and is operable to sequentially calibrate and align the respective lateral positions of the first and second optical modules with respect to the optical path. The system thereby allows for shaping of an incident light beam having a given predetermined wave-front and lateral direction intensity distribution in order to shape an output light beam having a desired wave-front and a desired lateral direction intensity distribution.
申请公布号 JP2014186292(A) 申请公布日期 2014.10.02
申请号 JP20130148549 申请日期 2013.07.17
申请人 APPLIED MATERIALS ISRAEL LTD 发明人 BINYAMIN KIRSHNER;HAIM EDER
分类号 G02B27/09;G01B11/00;G03F7/20;H01L21/027 主分类号 G02B27/09
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