| 摘要 |
PROBLEM TO BE SOLVED: To realize high pull-out voltage while maintaining hot switching resistance.SOLUTION: A MEMS device includes: a first electrode 20 provided on a support substrate 10; a second electrode 30 arranged to oppose the first electrode 20 in such a way that it is movable in a direction in which it opposes the first electrode 20; and a beam part 33 connected to each of two opposing sides of the second electrode 30 and elastically supporting the second electrode 30. The second electrode 30 includes: a slit 31 formed to pass through between the front and the back of the second electrode 30 in a direction parallel to the sides to which the beam part 33 is connected; and at least one bridge part 32 made of a material, which is different from that of the second electrode 30, and provided to bridge over the slit 31 while crossing the slit 31. |
