发明名称 LAMINATE FOR TEMPORARY BONDING IN SEMICONDUCTOR DEVICE MANUFACTURE, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 Provided is a laminate for temporary bonding in semiconductor device manufacture which is capable of reliably and easily providing temporary support for a member (such as a semiconductor wafer) being mechanically or chemically processed, wherein, even in high-temperature processing, said temporary support can easily be removed without damaging the member when processing has been completed; also provided is a semiconductor device manufacturing method. This laminate for temporary bonding in semiconductor device manufacture has (A) a release layer and (B) an adhesive layer, and the release layer (A) includes (a1) a resin (1) which has a softening point of 200°C or greater, and (a2) a resin (2), wherein 5 mass% or more of said resin (2) dissolves at 25°C in at least one of prescribed solvents after curing.
申请公布号 WO2014157440(A1) 申请公布日期 2014.10.02
申请号 WO2014JP58723 申请日期 2014.03.27
申请人 FUJIFILM CORPORATION 发明人 KOYAMA ICHIRO;IWAI YU
分类号 H01L21/02;C09J5/00;C09J7/02;H01L21/304 主分类号 H01L21/02
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