摘要 |
The present invention relates to a hard material layer system with a multiple-layer structure, comprising alternating layers A and B, with A layers having the composition in atomic percentage MeApAOnANmA and B layers having the composition in atomic percentage MeBpBOnBNmB, wherein the thermal conductivity of the A layers is greater than the thermal conductivity of the B layers. b. MeA and MeB each comprise at least one metal of the group Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W and AI, pA identifies the atomic percentages of MeA and pB the atomic percentages of MeB and the following is true: PA = PB, nA identifies the oxygen concentration in the A layers in atomic percentage, and nB identifies the oxygen concentration in the B layers in atomic percentage and the following is true: nA < nB, and mA identifies the nitrogen concentration in the A layers in atomic percentage and mB identifies the nitrogen concentration in the B layers in atomic percentage and the following is true: pA/(nA+mA) = pB/(nB+mB). |
申请人 |
OERLIKON TRADING AG, TRÜBBACH;ETH ZÜRICH;EMPA |
发明人 |
SOBIECH, MATTHIAS LUKAS;STEIN, SEBASTIAN;BÖTTGER, PAUL HEINRICH MICHAEL;SHKLOVER, VALERY;PATSCHEIDER, JÖRG |