发明名称 HARD MATERIAL LAYERS WITH SELECTED THERMAL CONDUCTIVITY
摘要 The present invention relates to a hard material layer system with a multiple-layer structure, comprising alternating layers A and B, with A layers having the composition in atomic percentage MeApAOnANmA and B layers having the composition in atomic percentage MeBpBOnBNmB, wherein the thermal conductivity of the A layers is greater than the thermal conductivity of the B layers. b. MeA and MeB each comprise at least one metal of the group Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W and AI, pA identifies the atomic percentages of MeA and pB the atomic percentages of MeB and the following is true: PA = PB, nA identifies the oxygen concentration in the A layers in atomic percentage, and nB identifies the oxygen concentration in the B layers in atomic percentage and the following is true: nA < nB, and mA identifies the nitrogen concentration in the A layers in atomic percentage and mB identifies the nitrogen concentration in the B layers in atomic percentage and the following is true: pA/(nA+mA) = pB/(nB+mB).
申请公布号 WO2014154356(A1) 申请公布日期 2014.10.02
申请号 WO2014EP00811 申请日期 2014.03.26
申请人 OERLIKON TRADING AG, TRÜBBACH;ETH ZÜRICH;EMPA 发明人 SOBIECH, MATTHIAS LUKAS;STEIN, SEBASTIAN;BÖTTGER, PAUL HEINRICH MICHAEL;SHKLOVER, VALERY;PATSCHEIDER, JÖRG
分类号 C23C14/00;C23C14/06;C23C14/34;C23C28/00 主分类号 C23C14/00
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