METHOD FOR REMOVING BRITTLE-HARD MATERIAL BY MEANS OF LASER RADIATION

摘要

The invention relates to a method for removing brittle-hard material by means of laser radiation, wherein a removal depression having a flank angle of the flanks of the removal depression forms in the material as a result of the removal, with an entrance edge, which is defined as a spatially extended region of the surface of the material where an unchanged and thus unremoved part of the surface of the material merges into the removal depression, at which spatial portions of the power of the laser radiation are refracted and focused into the volume of the unremoved material. The distribution of the laser radiation is set such that the entrance edge assumes a small spatial extent such that that portion of the power of the laser radiation which is included in the focusing effect of the entrance edge does not suffice to generate a threshold value Pdamage for the electron density in the volume of the material, in order thus to avoid damage to the material.