TARGET GENERATION DEVICE AND EXTREME-ULTRAVIOLET LIGHT GENERATION DEVICE

摘要

PROBLEM TO BE SOLVED: To improve stability of target supply.SOLUTION: A target generation device may also comprise: a reservoir for accommodating a liquid-state target material therein; a vibration element configured to vibrate the reservoir; a target sensor configured to detect droplets of the target material outputted from the reservoir; a control section configured to set a parameter on the basis of a result of the detection by the target sensor; a function generator configured to generate an electric signal having a waveform based on the parameter; and a power source configured to apply a drive voltage to the vibration element in accordance with the electric signal.