发明名称 SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To improve reliability of a semiconductor device.SOLUTION: In a semiconductor deice manufacturing method, logic chip (first semiconductor chip) LC and a laminate (second semiconductor chip) MCS are sequentially laminated on a wiring board 2. The logic chip LC is mounted on the wiring board 2 after performing alignment by an alignment mark 50a formed on the wiring board 2 and an alignment mark 50b formed on a surface 3a of the logic chip LC. On the other hand, the laminate MCS is mounted on a rear face 3b of the logic chip LC after performing alignment by an alignment mark 50c formed on the rear face 3b of the logic chip LC and an alignment mark 50d formed on the surface 3a of the laminate MCS.
申请公布号 JP2014187184(A) 申请公布日期 2014.10.02
申请号 JP20130061087 申请日期 2013.03.22
申请人 RENESAS ELECTRONICS CORP 发明人 KINOSHITA YOSHIHIRO
分类号 H01L25/065;H01L25/07;H01L25/18 主分类号 H01L25/065
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