PIEZOELECTRIC MEMS DEVICE AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To ensure reliability of a piezoelectric device, while enhancing the piezoelectric characteristics based on the crystal orientation, without cracking a piezoelectric thin film.SOLUTION: A piezoelectric MEMS device 1 includes a structure 20 which includes a mechanical element manufactured by semiconductor fabrication process, a support substrate 10 for supporting the structure 20, and a PZT thin film 21 supported by the structure 20. The structure 20 has a lever proximal end 22A supported on the supporting surface 10S of a supporting substrate 10, and a lever distal end 22B extending over the supporting surface 10S. The PZT thin film 21 is provided at at least the lever distal end 22B in the structure 20, and the c-axis orientation is enhanced by AC voltage application performed after molding of the supporting substrate 10.