VIBRATION ELEMENT, VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT

摘要

A vibration element includes a piezoelectric substrate including a vibrating section and a thick section having a thickness larger than that of the vibrating section. The thick section includes a first thick section provided along a first outer edge of the vibrating section, a second thick section provided along a second outer edge thereof, and a third thick section provided along a third outer edge thereof. When a maximum size of the second thick section in the vibration direction is Lmax and a minimum size thereof is Lmin, an average size expressed by (Lmax+Lmin)/2 is 100 μm or smaller.

主权项

1. A vibration element comprising:
a substrate that includes a first region having a vibration region that vibrates with a thickness shear vibration, and a second region that is integrated with the first region and has a thickness larger than that of the first region; and excitation electrodes that are respectively provided on front and rear surfaces of the vibration region, wherein the first region includes
a first outer edge and a second outer edge that are respectively provided on one side and the other side in a vibration direction of the thickness shear vibration and extend in a direction that intersects with the vibration direction, anda third outer edge and a fourth outer edge that are respectively provided on one side and the other side in the direction that intersects with the vibration direction, the fourth outer edge being exposed in a cross-sectional view of the substrate, wherein the second region includes
a first thick section that is provided along the first outer edge and is provided with a fixing section to be fixed to a target,a second thick section that is provided along the second outer edge, anda third thick section that is provided along the third outer edge and connects the first thick section and the second thick section, and wherein when a maximum size of the second thick section along the vibration direction is Lmax and a minimum size thereof is Lmin, an average size expressed by (Lmax+Lmin)/2 is 100 μm or smaller.