POWER SUPPLY DEVICE AND VACUUM PROCESSING APPARATUS USING THE SAME

摘要

A power supply device supplies power to a substrate holder having a plurality of electrodes. The device includes a first fixed conductive member, a second fixed conductive member, a fixed insulating member fixed to an insulating housing portion and configured to insulate the first fixed conductive member from the second fixed conductive member, a first rotation conductive member, a second rotation conductive member, a rotation insulating member fixed to an insulating column portion and configured to insulate the first rotation conductive member from the second rotation conductive member, a first power supply member configured to supply a first voltage to the substrate holder via the first rotation conductive member and the first fixed conductive member, and a second power supply member configured to supply a second voltage to the substrate holder via the second rotation conductive member and the second fixed conductive member.

主权项

1. A power supply device comprising:
a substrate holder capable of holding a substrate; a column connected to the substrate holder and including a first conductive column portion and second conductive column portion; a housing rotatably supporting the column and including a first conductive housing portion and a second conductive housing portion; a first conductive portion configured to supply a first voltage from the first conductive housing portion to the first conductive column portion; a second conductive portion configured to supply a second voltage from the second conductive housing portion to the second conductive column portion, the second conductive portion being insulated from the first conductive portion; a first power supply member connected to the first conductive column portion and configured to supply the first voltage to the substrate holder; and a second power supply member connected to the second conductive column portion and configured to supply the second voltage to the substrate holder, wherein a first space in contact with the first conductive portion and capable of flowing a coolant and a second space in contact with the second conducive portion and capable of flowing the coolant are formed in a gap between the column and the housing, and the power supply device further comprises a separating section configured to separate the first space from a member applied with the second voltage and separating the second space from a member applied with the first voltage.