发明名称 MEMS APPARATUS WITH INCREASED BACK VOLUME
摘要 A microelectromechanical system (MEMS) microphone assembly includes a base and a cover. The cover is coupled to the base and together with the base defines a cavity. The base forms a recess and the recess has dimensions and a shape so as to hold a MEMS die. The MEMS die includes a diaphragm and back plate.
申请公布号 WO2014160605(A1) 申请公布日期 2014.10.02
申请号 WO2014US31432 申请日期 2014.03.21
申请人 KNOWLES ELECTRONICS, LLC 发明人 CONKLIN, WADE
分类号 H04R19/00;H01L29/84 主分类号 H04R19/00
代理机构 代理人
主权项
地址