| 摘要 |
PROBLEM TO BE SOLVED: To reduce the amount of arithmetic processing of a wiring pattern laid over correction regions in exposing a printed circuit board provided with a plurality of correction regions and realize high-accuracy correction processing with less resources.SOLUTION: With a region composed of four reference alignment marks as a single correction region, a designed wiring pattern is divided into first wiring patterns composed of basic patterns, and a correction factor is created for each correction region from the on-design coordinates of the reference alignment marks and measurements. The results of calculation of contours of the measured correction regions are stored in a contour table region by region, and the first wiring pattern is corrected on the basis of the correction factors for each correction region to create a second wiring pattern. The second wiring pattern is converted into a first exposure pattern as raster data, and, referring to the contour table, parts jutting out from the correction regions of the first exposure pattern are deleted to create a second exposure pattern. The second exposure patterns of individual correction regions are combined to create an exposure pattern, and a printed circuit board is exposed. |
