FOCUSED ION BEAM APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a focused ion beam apparatus which enables the shortening of a down time for replacement of an emitter and the increase in operation rate.SOLUTION: A focused ion beam apparatus comprises: an ion source room 10 in which an emitter 11 capable of emitting an ion beam is provided; a focused ion beam barrel 20 for focusing and directing the ion beam emitted by the ion source room 10; a preliminary chamber 30 whose inside communicates to inside the focused ion beam barrel 20 through a first communicating hole 21; a pump 35 for the preliminary chamber for evacuating the preliminary chamber 30 to create a vacuum; an on-off valve 40 for opening and closing the first communicating hole 21; and a transport device 45 for transporting the ion source room 10 to inside the focused ion beam barrel 20 and the preliminary chamber 30 through the first communicating hole 21.