METHOD FOR DETECTING HEAT GENERATION POINTS AND DEVICE FOR DETECTING HEAT GENERATE POINTS

摘要

A heat generation point detection method comprises: step of stabilizing an average temperature of a surface of an integrated circuit S; steps of applying a bias voltage of a low frequency to the integrated circuit S and acquiring a heat generation detection signal detected from the integrated circuit S in response thereto; steps of supplying a bias voltage of a high frequency and acquiring a heat generation detection signal detected in response thereto; steps of detecting a phase shift between the bias voltage of the low frequency and the heat generation detection signal and a phase shift between the bias voltage of the high frequency and the heat generation detection signal; and step of calculating a change rate of the phase shift against a square root of the frequency of the bias voltage, and obtaining depth information of the heat generation point from the change rate.

主权项

1. A method for detecting a depth of a heat generation point in an integrated circuit, comprising steps of:
stabilizing an average temperature of a surface of the integrated circuit; supplying a first electric signal at a first frequency the integrated circuit; detecting a first detection signal indicative of a change of an amount of heat generation detected from the integrated circuit in response the first electric signal; supplying a second electric signal at a second frequency different from the first frequency to the integrated circuit; detecting a second detection signal indicative of a change of an amount of heat generation detected from the integrated circuit in response the second electric signal; and obtaining depth information of the heat generation point, based on the first and second detection signals.