CARBON-DOPED ZINC OXIDE FILM AND METHOD FOR PRODUCING SAME

摘要

Disclosed is a carbon-doped zinc oxide film which is produced by at least one film formation process selected from a sputtering process and a PLD process and is composed of zinc oxide polycrystals doped with carbon at a concentration of 1.0 × 1019 atoms/cm3 or more. The carbon-doped zinc oxide film can be produced by a method comprising the steps of: providing a composite target comprising zinc, oxygen and carbon as constituent elements; and forming a film by a sputtering process and/or a PLD process using the composite target to thereby form the carbon-doped zinc oxide film. According to the present invention, a zinc oxide film doped with carbon at a high concentration can be produced and provided in a relatively simple and inexpensive manner with high reliability.