摘要 |
Determining the complex refractive index, n-ik, of a test sample by calculating first ratio data of first intensity data of a first series of intensity values from measurements on the sample and second intensity data of a second series of intensity values from measurements on a reference sample of known n and k; using the first ratio data to calculate candidate value pairs for n and k; determining second ratio data between third intensity data of a third series of intensity values resulting from measurements on the test sample after coating with a material of known n and k and the second intensity data or to a ratio between the third intensity data and fourth intensity data of a fourth series of intensity values from measurements on the reference sample or another reference sample of known spectral n and k; and carrying out a fitting procedure using the second ratio data and the candidate value pairs for n and k by fitting the second ratio data to synthetic ratio data which is a function of n and k, so as to determine n and k for the test sample. |