发明名称 Apparatus for and a method of determining a characteristic of a sample
摘要 Determining the complex refractive index, n-ik, of a test sample by calculating first ratio data of first intensity data of a first series of intensity values from measurements on the sample and second intensity data of a second series of intensity values from measurements on a reference sample of known n and k; using the first ratio data to calculate candidate value pairs for n and k; determining second ratio data between third intensity data of a third series of intensity values resulting from measurements on the test sample after coating with a material of known n and k and the second intensity data or to a ratio between the third intensity data and fourth intensity data of a fourth series of intensity values from measurements on the reference sample or another reference sample of known spectral n and k; and carrying out a fitting procedure using the second ratio data and the candidate value pairs for n and k by fitting the second ratio data to synthetic ratio data which is a function of n and k, so as to determine n and k for the test sample.
申请公布号 GB201414549(D0) 申请公布日期 2014.10.01
申请号 GB20140014549 申请日期 2014.08.15
申请人 TAYLOR HOBSON LIMITED 发明人
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