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发明名称
一种等离子处理装置及其处理方法
摘要
一种等离子处理装置,包括:一个射频电源输出射频功率到一个等离子反应腔;一个等离子状态检测装置检测所述等离子反应腔内光学信号;一个脉冲信号发生器产生脉冲信号并输出到所述射频电源,所述等离子状态检测装置接收所述脉冲信号并处理所述检测到的等离子反应腔内的光学信号。本发明能够在不同脉冲时间段内,根据不同脉冲阶段的功率特性对检测到的等离子光学信号做出即时的调整,最终获得稳定、可靠的光学信号,即时反应等离子反应腔内的状态。
申请公布号
TW201438091
申请公布日期
2014.10.01
申请号
TW103101549
申请日期
2014.01.16
申请人
中微半导体设备(上海)有限公司
发明人
杨平;黄智林;倪图强
分类号
H01L21/306(2006.01);H01L21/66(2006.01)
主分类号
H01L21/306(2006.01)
代理机构
代理人
<name>张淑婷</name>
主权项
地址
中国
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