CIS-BASED THIN FILM SOLAR BATTERY AND PROCESS FOR PRODUCING THE SAME

摘要

An alkali-barrier layer and a metallic back electrode layer are deposited at low cost in a short time and the phenomenon in which a light absorption layer peels off and the metallic back electrode layer is prevented. The invention relates to: a CIS type thin-film solar cell 1 comprising a glass substrate 2, an alkali-free layer 7, e.g., silica, a multilayered metallic back electrode layer 3, a p-type CIS-based light absorption layer 4, a high-resistance buffer layer 5, and an n-type window layer 6 which have been superposed in this order; and a process for producing the cell. The layer 7 or a combination of it and the first layer 3a of the layer 3 serves as an alkali-barrier layer 8 for preventing and controlling the thermal diffusion of alkali ingredients from the substrate 2 into the light absorption layer during the deposition of the layer 4. The layer 3a comprises crystal grains which are fine and highly dense. The layer 7 is deposited on the substrate by the RF or DC sputtering method and the layer 3 is successively deposited on the layer 7 by the DC sputtering method.