The present invention provides a signal processing method of an ExB probe. The signal processing method comprises the steps of: measuring a probe current spectrum according to an applied voltage of the ExB probe; calculating a characteristic matrix of the ExB probe for connecting the probe current spectrum and an ion energy distribution function of ions that enter the ExB probe; and obtaining a formal solution of the ion energy distribution function by using regularization.
申请公布号
KR101446083(B1)
申请公布日期
2014.10.01
申请号
KR20130082653
申请日期
2013.07.15
申请人
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY;UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY
发明人
CHOE, WON HO;LIM, YOU BONG;KIM, HO LAK;SEON, JONG HO