| 摘要 |
The purpose of the invention is to provide an imprinting device and an imprinting method with which the size of the device and the cost can be reduced. An imprinting device for transferring a molding pattern of a mold (1) to a substance being molded (2), the device being configured from: a case (33) that configures a controlled pressure chamber (30); a stage (32) that supports the mold (1) and the substance being molded (2); a frame (43) that surrounds the perimeter of the stage (32); a first movement means (not shown) capable of moving the case (33) relatively toward and away from the stage (32); a second movement means (46) capable of moving the case (33) relatively toward and away from the frame (43); a pressure-controlling means (35) for adjusting the pressure of the fluid in the controlled pressure chamber (30); and a pressure-reducing means (45) for reducing the pressure of a pressure reduction chamber (40) configured from the stage (32), the frame (43), and the mold (1) or the substance being molded (2), and re moving the fluid between the mold (I) and the substance being molded (2). |
