发明名称
摘要 A liquid application apparatus includes: a head including a plurality of nozzles which eject droplets of liquid having functional properties toward a substrate; a relative movement device which causes the head and the substrate to move relatively to each other in a relative movement direction; a droplet ejection control device which operates the head at a prescribed droplet ejection period so as to deposit the droplets discretely onto the substrate; an x-direction droplet deposition pitch changing device which changes a deposition pitch of the droplets on the substrate in an x direction perpendicular to the relative movement direction; and a y-direction droplet deposition pitch changing device which changes a deposition pitch of the droplets on the substrate in a y direction parallel to the relative movement direction.
申请公布号 JP5599205(B2) 申请公布日期 2014.10.01
申请号 JP20100060919 申请日期 2010.03.17
申请人 发明人
分类号 H01L21/027;B05C9/12;B05C11/10;B05D1/26 主分类号 H01L21/027
代理机构 代理人
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