| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for easily and minutely analyzing the structure of a porous material. SOLUTION: A method for analyzing the structure of a porous material allows small angle electron beam scattering to form a small angle electron beam scattering image 15 through image formation of a small angle electron beam scattering portion emerging at the central part of the electron beam diffraction image of the porous material. In particular, the image data of the small angle electron beam scattering image 15 can be processed for structure analysis. The structure analysis processing for the small angle electron beam scattering portion may be combined for use. In addition, a transmission image may be combined for use. COPYRIGHT: (C)2012,JPO&INPIT |
