发明名称
摘要 A pattern generation system includes an optical system and a rotor. The optical system is configured to project a laser image onto an optical scanner. The rotor has a plurality of optical arms arranged at a first angle relative to one another, and further includes the optical scanner. The laser image is sequentially reflected by the optical scanner into each of the plurality of optical arms of the rotor to generate a pattern on a workpiece.
申请公布号 JP5598936(B2) 申请公布日期 2014.10.01
申请号 JP20120527230 申请日期 2010.09.01
申请人 发明人
分类号 G03F7/20;G02B17/08;G02B26/12;H01L21/027 主分类号 G03F7/20
代理机构 代理人
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