| 摘要 |
PROBLEM TO BE SOLVED: To reduce the dimensional precision required for a frame-like portion in a pressure detecting component. SOLUTION: A pressure detecting component 10 includes: an insulating base 1; a frame-like portion 2 provided on the insulating base 1; a diaphragm 3 provided on the frame-like portion so as to form a closed space 13 between the diaphragm and the insulating base 1; and a first electrode pattern 41 and a second electrode pattern 42 for capacitance formation, which are provided apart from each other on a surface of the diaphragm 3 facing the insulating base 1. COPYRIGHT: (C)2012,JPO&INPIT |
