发明名称 ANGULAR VELOCITY SENSOR AND DETECTION ELEMENT USED THEREIN
摘要 A detection element has: first and second fixed parts; first and second vertical beams each connected at first and second ends to the first and second fixed parts, respectively; a horizontal beam connected at first and second ends to centers of the first and second vertical beams, respectively; and four arms each connected at a first end to the horizontal beam and having a weight formed on a second end. The first vertical beam has a first slit formed nearer the first fixed part with respect to its center, a second slit formed nearer the second fixed part with respect to its center, and a coupling portion between these slits. The second vertical beam has a third slit formed nearer the first fixed part with respect to its center, a fourth slit formed nearer the second fixed part with respect to its center, and a coupling portion between these slits.
申请公布号 EP2784443(A1) 申请公布日期 2014.10.01
申请号 EP20120852311 申请日期 2012.11.16
申请人 PANASONIC CORPORATION 发明人 YAMAMOTO, KENSAKU
分类号 H01L41/08;G01C19/5621;G01C19/5747;H01L41/09;H01L41/18 主分类号 H01L41/08
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