发明名称 ETCHING APPARATUS
摘要 <p>An etching apparatus according to an embodiment of the present invention comprises a supporting member which slopingly supports a substrate; a first spraying member which sprays etching liquid to the substrate; and a second spraying member which sprays a lot more amount of the etching liquid than that of the first spraying member to the substrate. The first spraying member is arranged closely to the lower end of the substrate, and the second spraying member is arranged closely to the upper end of the substrate.</p>
申请公布号 KR20140115829(A) 申请公布日期 2014.10.01
申请号 KR20130031019 申请日期 2013.03.22
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 HAM, YUN SIK;JEON, JAE KWANG
分类号 H01L21/306 主分类号 H01L21/306
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