发明名称 VIBRATION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
摘要 A vibration control apparatus (50) includes a first spring mechanism (3) to support a first object as part of a first system. To control vibration of the first object, a first actuator (4) applies a force to the first object via a command value generated by a first computing based on an output of a detection system. The detection system includes a second spring mechanism (23) to support a second object as part of a second system. A third spring mechanism (24) supports a third object as part of a third system. The first displacement detector detects displacement of the third object relative to the second object. The third object is prevented from being displaced relative to the second object. A second natural frequency of the second system is higher than a first natural frequency of the first system, and a third natural frequency of a third system is higher than the first natural frequency.
申请公布号 KR101446383(B1) 申请公布日期 2014.10.01
申请号 KR20110110920 申请日期 2011.10.28
申请人 发明人
分类号 G03F7/20;G05D19/00 主分类号 G03F7/20
代理机构 代理人
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