发明名称 |
METHODS OF FORMING CONTACT STRUCTURES INCLUDING ALTERNATING METAL AND SILICON LAYERS AND RELATED DEVICES |
摘要 |
A method of forming a semiconductor device, the method comprising providing a semiconductor layer, and providing a first layer of a first metal on the semiconductor layer. A second layer may be provided on the first layer of the first metal. The second layer may include a layer of silicon and a layer of a second metal, and the first and second metals may be different. The first metal may be titanium and the second metal may be nickel. Related devices, structures, and other methods are also discussed. |
申请公布号 |
EP2534684(A4) |
申请公布日期 |
2014.10.01 |
申请号 |
EP20110742673 |
申请日期 |
2011.02.08 |
申请人 |
CREE, INC. |
发明人 |
HAGLEITNER, HELMUT;RING, ZOLTAN;SHEPPARD, SCOTT;HENNING, JASON;GURGANUS, JASON;NAMISHIA, DAN |
分类号 |
H01L23/48 |
主分类号 |
H01L23/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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