发明名称 Method for activating a copper surface for electroless plating
摘要 The present invention relates to method for activating a copper or copper alloy surface for depositing a metal or metal alloy layer by electroless (autocatalytic) plating thereon wherein the formation of undesired voids is suppressed. The copper or copper alloy surface is contacted with palladium ions, at least one phosphonate compound and halide ions followed by electroless (autocatalytic) deposition of a metal such as palladium or a metal alloy such as a Ni-P alloy.
申请公布号 EP2784180(A1) 申请公布日期 2014.10.01
申请号 EP20130160785 申请日期 2013.03.25
申请人 ATOTECH DEUTSCHLAND GMBH 发明人 KILIAN, ARND, DR.;WEGRICHT, JENS;LAUTAN, DONNY
分类号 C23C18/18;H01L21/288;H05K3/24 主分类号 C23C18/18
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