发明名称 Factory level process and final product performance control system
摘要 A factory control server stores module configuration data for modules. The modules include processes for producing a final product and have corresponding module requirements. The factory control server analyzes in real-time actual product output data that is generated by a final product tester after a factory produces at least one final product to determine whether the actual product output data meets an expected product output. The factory control server analyzes actual module data in real-time to determine a new module requirement to cause new actual product output data for a subsequent final product to meet the expected product output in response to a determination that the actual product output data does not meet the expected product output. The factory control server notifies a module controller in real-time of the new module requirement. The module controller changes parameters in real-time to manufacture the subsequent final product.
申请公布号 US8849438(B2) 申请公布日期 2014.09.30
申请号 US201113299081 申请日期 2011.11.17
申请人 Applied Materials, Inc. 发明人 Parikh Suketu Arun;Schwarm Alexander T.;Mittal Sanjiv;Gay Charles
分类号 G06F17/00;G05B13/02;G06F19/00;G01N37/00;G06F11/30;G21C17/00;G06F11/00;G05B19/418 主分类号 G06F17/00
代理机构 Blakely, Sokoloff, Taylor & Zafman LLP 代理人 Blakely, Sokoloff, Taylor & Zafman LLP
主权项 1. A computer-implemented method comprising: storing, by a factory control server including a processing device, module configuration data for a plurality of modules, wherein the plurality of modules comprises processes for producing a final product, and the plurality of modules has corresponding module requirements; analyzing in real-time, by the factory control server, actual product output data that is generated by a final product tester after a factory produces at least one final product to determine whether the actual product output data meets an expected product output; analyzing, by the factory control server, actual module data in real-time to determine a new module requirement to cause new actual product output data for a subsequent final product to meet the expected product output in response to a determination that the actual product output data does not meet the expected product output; and notifying, by the factory control server, a module controller in real-time of the new module requirement, wherein the module controller changes parameters in real-time to manufacture the subsequent final product using the new module requirement.
地址 Santa Clara CA US