Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition

摘要

One embodiment provides an apparatus for material deposition. The apparatus includes a reaction chamber, and a pair of susceptors. Each susceptor has a front side mounting substrates and a back side. The front sides of the vertically positioned susceptors face each other, and the vertical edges of the susceptors are in contact with each other. The apparatus also includes a number of gas nozzles for injecting reaction gases. The gas flow directions inside the chamber can be alternated by controlling the gas nozzles. The gas nozzles are configured to inject a small amount of purge gas including at least one of: HCl, SiCl4, and H2 when the gas nozzles are not injecting reaction gas. The apparatus includes a number of heating units situated outside the reaction chamber. The heating units are arranged in such a way that they radiate heat energy directly to the back sides of the susceptors.

主权项

1. An apparatus for material deposition, comprising:
a reaction chamber formed using a material that is transparent to radiation energy; a pair of susceptors situated inside the reaction chamber, wherein each susceptor has a front side and a back side, wherein the front side mounts a number of substrates, wherein the susceptors are positioned vertically in such a way that the front sides of the susceptors face each other, and wherein the vertical edges of the susceptors are in contact with each other, thereby forming a substantially enclosed narrow channel between the substrates mounted on different susceptors; and a first gas nozzle situated at a top of the reaction chamber and a second gas nozzle situated at a bottom of the reaction chamber directly below the first gas nozzle, wherein each of the first and second gas nozzles includes a gas inlet for injecting reaction gas into the narrow channel and a gas outlet for outputting exhaust, wherein the gas outlet associated with either the first or the second gas nozzle encloses the gas inlet associated with a same gas nozzle, wherein the gas inlet and the gas outlet associated with either the first or the second gas nozzle are coupled to different gas lines, and wherein the gas inlet and the gas outlet associated with either the first or the second gas nozzle are controlled in such a way that reaction gas flow directions inside the narrow channel can be alternated, thereby facilitating uniform material deposition.