Gas flow rate measurement device

摘要

Provided is a highly accurate, highly reliable gas flow rate measurement device that provides an enlarged temperature range over which the resolution at a high temperature and at a low temperature can be increased to achieve high accuracy no matter whether the characteristics of a gas temperature detection element are nonlinear. The gas flow rate measurement device includes a plurality of resistors that are disposed in a gas flow path, a gas flow rate detection circuit that outputs a gas flow rate detection signal in accordance with the flow rate of a gas flowing in the gas flow path by detecting a current flowing in the resistors or by detecting a voltage generated in accordance with the current, and a gas temperature detection element 1 that detects the temperature of the gas in the gas flow path. The gas flow rate detection circuit includes signal conversion means for converting a signal output from the gas temperature detection element to a signal that has a predetermined maximum output and a predetermined minimum output and is linear within a predetermined temperature range.

主权项

1. A gas flow rate measurement device comprising:
a plurality of resistors that are disposed in a gas flow path; a gas flow rate detection circuit that outputs a gas flow rate detection signal in accordance with the flow rate of a gas flowing in the gas flow path by detecting a current flowing in the resistors or by detecting a voltage generated in accordance with the current; and a gas temperature detection element that detects the temperature of the gas in the gas flow path; wherein the gas flow rate detection circuit includes signal conversion means for converting a signal output from the gas temperature detection element to a signal that has a predetermined maximum output and a predetermined minimum output and is linear within a predetermined temperature range.