Electrostatic chuck

摘要

An electrostatic chuck for manufacturing a flat panel display is disclosed. In one embodiment, the electrostatic chuck includes i) a base substrate, ii) an insulating layer formed on the base substrate and iii) a conductive layer formed on the insulating layer and electrically connected to a power device. The electrostatic chuck further includes a dielectric layer formed on the conductive layer and including an emboss part and a trench part surrounding the emboss part. The emboss part comprises a plurality of contact parts and at least one protrusion. The trench part includes at least one channel. The contact parts and the protrusion have different shapes. The electrostatic chuck further includes a cooling gas line extending through the base substrate, the insulating layer, the conductive layer, and the dielectric layer.

主权项

1. An electrostatic chuck for manufacturing a flat panel display, comprising:
a base substrate; an insulating layer formed on the base substrate; a conductive layer formed on the insulating layer and electrically connected to a power device; a dielectric layer formed on the conductive layer and comprising an emboss part and a trench part surrounding the emboss part, wherein the emboss part comprises at least one protrusion, wherein the trench part comprises a plurality of contact parts and at least one channel between the contact parts, and wherein each of the contact parts has a width larger than that of the channel; and a cooling gas line extending through the base substrate, the insulating layer, the conductive layer, and the dielectric layer.