Method for producing piezoelectric thin-film element, piezoelectric thin-film element, and member for piezoelectric thin-film element

摘要

Provided is a method for producing a piezoelectric thin-film element including a piezoelectric thin-film layer having good surface morphology and high crystallinity. The method includes forming a lower electrode layer on a substrate; forming a piezoelectric thin-film buffer layer on the lower electrode layer at a relatively low film-formation temperature; forming a piezoelectric thin-film layer on the piezoelectric thin-film buffer layer at a film-formation temperature that is higher than the film-formation temperature for the piezoelectric thin-film buffer layer; and forming an upper electrode layer on the piezoelectric thin-film layer.

主权项

1. A piezoelectric thin-film element comprising a substrate; a lower electrode layer on the substrate; and at least one piezoelectric thin-film buffer layer containing granular crystals on the lower electrode layer, a crystallized piezoelectric thin-film layer on the piezoelectric thin-film buffer layer, and an upper electrode layer on the piezoelectric thin-film layer, wherein the piezoelectrics of the piezoelectric thin-film buffer layer and the piezoelectric thin-film layer have a perovskite structure containing K, Na, and Nb.