发明名称 |
Linear evaporation source and deposition apparatus having the same |
摘要 |
A linear evaporation source and a deposition apparatus having the same are disclosed. In one embodiment, the linear evaporation source includes i) a crucible being open on one side thereof and configured to store a deposition material and ii) a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof. The source further includes i) a nozzle section located on the open side of the crucible and comprising a plurality of nozzles, ii) a heater configured to heat the crucible and iii) a housing configured to accommodate to the crucible, the nozzle section, and the heater. |
申请公布号 |
US8845807(B2) |
申请公布日期 |
2014.09.30 |
申请号 |
US201012972327 |
申请日期 |
2010.12.17 |
申请人 |
Samsung Display Co., Ltd. |
发明人 |
Seo Min-Gyu;Han Sang-Jin;Roh Cheol-Lae;Ahn Jae-Hong |
分类号 |
C23C14/26;C23C16/448;C23C14/24 |
主分类号 |
C23C14/26 |
代理机构 |
Knobbe, Martens, Olson & Bear, LLP |
代理人 |
Knobbe, Martens, Olson & Bear, LLP |
主权项 |
1. A linear evaporation source for manufacturing flat panel displays comprising a crucible being open on one side thereof and configured to store a deposition material;
a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof; a nozzle section located on the open side of the crucible and comprising a plurality of nozzles; a heater configured to heat the crucible; and a housing configured to accommodate the crucible, the nozzle section, and the heater; wherein the housing includes a bottom facing the nozzle section; and wherein the partitions are integrally formed with the crucible; and wherein a stepped recess is formed in each of the partitions; and wherein the stepped recess is formed substantially directly above the opening; and wherein the opening includes a slit formed in a direction extending from the bottom of the housing to the nozzle section such that the opening is connected to the stepped recess. |
地址 |
Gyeonggi-do KR |