Piezoelectric element, piezoelectric actuator, liquid ejecting head, and liquid ejecting apparatus

摘要

A piezoelectric element includes a first electrode, a first multilayer composite disposed on the first electrode, a second multilayer composite disposed on the first electrode with a distance from the first multilayer composite, and a covering layer covering the side surfaces of the first and second multilayer composites and the surface of the first electrode between the first multilayer composite and the second multilayer composite. The first and second multilayer composites each include a piezoelectric layer and a second electrode over the piezoelectric layer. The first electrode contains a metal that can react with chlorine, and has at least one of a bump and a dip at the surface thereof between the first multilayer composite and the second multilayer composite.

主权项

1. A piezoelectric element comprising:
a first electrode containing a metal that can react with chlorine; a first multilayer composite disposed on the first electrode, the first multilayer composite including a piezoelectric layer and a second electrode over the piezoelectric layer; a second multilayer composite disposed on the first electrode at a distance from the first multilayer composite, the second multilayer composite including a piezoelectric layer and a second electrode over the piezoelectric layer; and a covering layer covering the side surfaces of the first and second multilayer composites and the surface of the first electrode between the first multilayer composite and the second multilayer composite, wherein the first electrode has at least one of a bump and a dip at the surface thereof between the first multilayer composite and the second multilayer composites; wherein the bump contains lanthanum, nickel and chlorine.