发明名称 |
Method for indium sputtering and for forming chalcopyrite-based solar cell absorber layers |
摘要 |
A solar cell includes an absorber layer formed of a CIGAS, copper, indium, gallium, aluminum, and selenium. A method for forming the absorber layer provides for using an indium-aluminum target and depositing an aluminum-indium film as a metal precursor layer using sputter deposition. Additional metal precursor layers such as a CuGa layer are also provided and a thermal processing operation causes the selenization of the metal precursor layers. The thermal processing operation/selenization operation converts the metal precursor layers to an absorber layer. In some embodiments, the absorber layer includes a double graded chalcopyrite-based bandgap. |
申请公布号 |
US8846438(B2) |
申请公布日期 |
2014.09.30 |
申请号 |
US201414219628 |
申请日期 |
2014.03.19 |
申请人 |
TSMC Solar Ltd. |
发明人 |
Yen Wen-Tsai;Wu Chung-Hsien;Chen Shih-Wei;Lee Wen-Chin |
分类号 |
H01L21/00;H01L31/18 |
主分类号 |
H01L21/00 |
代理机构 |
Duane Morris LLP |
代理人 |
Duane Morris LLP |
主权项 |
1. A method for forming a solar cell, said method comprising:
providing a target of indium and a further material selected from the group consisting of Al, Zn, Cr, Ni, and Ta; providing a substrate with a back contact layer thereon; forming metallic precursor layers over said back contact layer including sputtering materials of said target onto said substrate over said back contact layer; and thermally processing thereby converting said metallic precursor layers to an absorber layer. |
地址 |
Taichung TW |